Dutch photolithography leader ASML faced a sudden setback as export licenses for two models of Deep Ultraviolet (DUV) lithography machines approved in 2023 were revoked, the company said on January 2.

Despite the setback, most pending orders from Chinese customers who pre-paid for DUV lithography machines have been fulfilled.

ASML has been consistently supplying lithography machines, including the NXT:2000i and advanced DUV models, to Chinese customers throughout 2023.

However, the company is still unable to sell the more advanced Extreme Ultraviolet (EUV) lithography machines designed for producing 7-nanometer and below chips to Chinese clients.